MECH&AE M282
Microelectromechanical Systems (MEMS) Device Physics and Design
Mechanical and Aerospace Engineering · 4 units · Graduate courses (200-299)
(Same as Bioengineering M252 and Electrical and Computer Engineering M252.) Introduction to MEMS design. Design methods, design rules, sensing and actuation mechanisms, microsensors, and microactuators. Designing MEMS to be produced with both foundry and nonfoundry processes. Computer-aided design for MEMS. Design project required.
Letter grading.
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Requisites
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