MECH&AE M280B · MAE M280BMicroelectromechanical Systems (MEMS) Fabrication
Mechanical and Aerospace Engineering · 4 units · Graduate courses (200-299)
(Same as Bioengineering M250B and Electrical and Computer Engineering M250B.) Advanced discussion of micromachining processes used to construct MEMS. Coverage of many lithographic, deposition, and etching processes, as well as their combination in process integration. Materials issues such as chemical resistance, corrosion, mechanical properties, and residual/intrinsic stress.
Letter grading.
When it runs
- Winter 2026
- Winter 2027
Scheduled, not typical — from UCLA’s Schedule of Classes, which publishes Fall 2025 through Spring 2027 and nothing before it.
Requisites
Official UCLA wording
Enforced requisite: course M183B.
BruinTree reads · Prerequisite
confidence 1.00 · from textRequires
Everything that has to come before this course, not just the courses named in the requisite above.
MECH&AE M280B
- MECH&AE M183BIntroduction to Microscale and Nanoscale Manufacturing
- CHEM 20AChemical Structure
- PHYSICS 1APhysics for Scientists and Engineers: Mechanics
- PHYSICS 1BPhysics for Scientists and Engineers: Oscillations, Waves, Electric and Magnetic Fields
- MATH 31BIntegration and Infinite Series
- PHYSICS 1CPhysics for Scientists and Engineers: Electrodynamics, Optics, and Special Relativity
- MATH 32ACalculus of Several Variables
- MATH 32BCalculus of Several Variables
- PHYSICS 1BPhysics for Scientists and Engineers: Oscillations, Waves, Electric and Magnetic Fieldsanother path to it
- PHYSICS 4ALPhysics Laboratory for Scientists and Engineers: Mechanics
- PHYSICS 1AHPhysics for Scientists and Engineers: Mechanics (Honors)
- PHYSICS 1BPhysics for Scientists and Engineers: Oscillations, Waves, Electric and Magnetic Fieldsanother path to it
- PHYSICS 1BHPhysics for Scientists and Engineers: Oscillations, Waves, Electric and Magnetic Fields (Honors)
1 direct requisite. Showing 23 courses over 3 levels; the branches marked with a count carry on past it. Every course here opens its own tree.
Unlocks
What this course is a requisite for, and what those courses lead to in turn.
No course in the catalog lists this as a requisite.