MAT SCI 224
Deposition Technologies and Their Applications
Materials Science and Engineering · 4 units · Graduate courses (200-299)
Examination of physics behind majority of modern thin film deposition technologies based on vapor phase transport. Basic vacuum technology and gas kinetics. Deposition methods used in high-technology applications. Theory and experimental details of physical vapor deposition (PVD), chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition processes.
Letter grading.
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