EC ENGR M252 · EE M252Microelectromechanical Systems (MEMS) Device Physics and Design
Electrical and Computer Engineering · 4 units · Graduate courses (200-299)
(Same as Bioengineering M252 and Mechanical and Aerospace Engineering M282.) Introduction to MEMS design. Design methods, design rules, sensing and actuation mechanisms, microsensors, and microactuators. Designing MEMS to be produced with both foundry and nonfoundry processes. Computer-aided design for MEMS. Design project required.
Letter grading.
When it runs
Not on the schedule for any of Fall 2025 through Spring 2027. UCLA publishes only that window, so this does not mean the course is gone — check the official listing.
Requisites
UCLA lists no requisites for this course.
Requires
Everything that has to come before this course, not just the courses named in the requisite above.
Nothing — this is an entry point.
Unlocks
What this course is a requisite for, and what those courses lead to in turn.
No course in the catalog lists this as a requisite.