EC ENGR M250B
Microelectromechanical Systems (MEMS) Fabrication
Electrical and Computer Engineering · 4 units · Graduate courses (200-299)
(Same as Bioengineering M250B and Mechanical and Aerospace Engineering M280B.) Advanced discussion of micromachining processes used to construct MEMS. Coverage of many lithographic, deposition, and etching processes, as well as their combination in process integration. Materials issues such as chemical resistance, corrosion, mechanical properties, and residual/intrinsic stress.
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Requisites
Official UCLA wording
Enforced requisite: course M153.
BruinTree reads · Prerequisite
confidence 1.00 · from textRequires
Everything that has to come before this course, not just the courses named in the requisite above.
EC ENGR M250B
- EC ENGR M153Introduction to Microscale and Nanoscale Manufacturing
- CHEM 20AChemical Structure
- PHYSICS 1APhysics for Scientists and Engineers: Mechanics
1 direct requisite. Showing 23 courses over 3 levels; the branches marked with a count carry on past it. Every course here opens its own tree.
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