Introduction to Microscale and Nanoscale Manufacturing

(Same as Chemical Engineering M153, Electrical and Computer Engineering M153, and Mechanical and Aerospace Engineering M183B.) Introduction to general manufacturing methods, mechanisms, constrains, and microfabrication and nanofabrication. Focus on concepts, physics, and instruments of various microfabrication and nanofabrication techniques that have been broadly applied in industry and academia, including various photolithography technologies, physical and chemical deposition methods, and physical and chemical etching methods. Hands-on experience for fabricating microstructures and nanostructures in modern clean-room environment.

Letter grading.